Introduction to Micro-electromechanical Systems

At the end of this course, the students should be able to: 1. design electronics controls for mechanical systems; 2. model and simulate systems that combines mechanical, electrical and electronics aspects; and 3. analyse, design and simulate multiphysical systems.

Overview of microelectromechanical systems (MEMS). Use of MEMS with radio frequency, optical and biomedical devices. Basic MEMS building blocks; cantilever and clamped-clamped beams. Actuation mechanisms of mechanical, thermal and electrostatic microdevices. The thin film fabrication process, deposition, lithography, etching and release. MEMS in circuits, switches, capacitors, and resonators. Prerequisites: SSG 350, SSG 321. Corequisite SSG 438